Formation of Fine Protrusions by Sputter Etching of Commercially Pure Titanium
Autor: | Rongguang Wang, Takashi Kubo, Tsunetaka Sumomogi, Keijiro Nakasa, Akihiro Yamamoto |
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Rok vydání: | 2017 |
Předmět: |
010302 applied physics
Commercially pure titanium Materials science Metallurgy Metals and Alloys 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Mechanics of Materials Etching (microfabrication) Sputtering 0103 physical sciences Materials Chemistry 0210 nano-technology |
Zdroj: | Journal of the Japan Institute of Metals. 81:211-220 |
ISSN: | 1880-6880 0021-4876 |
DOI: | 10.2320/jinstmet.j2016064 |
Databáze: | OpenAIRE |
Externí odkaz: |