Thickness-dependent physical and nanomechanical properties of AlxGa1−xN thin films

Autor:	N. Boughrara, Z. Benzarti, A. Khalfallah, J.C. Oliveira, M. Evaristo, A. Cavaleiro
Rok vydání:	2022
Předmět:	Mechanics of Materials Mechanical Engineering General Materials Science Condensed Matter Physics
Zdroj:	Materials Science in Semiconductor Processing. 151:107023
ISSN:	1369-8001
DOI:	10.1016/j.mssp.2022.107023
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d48486103662b0702ffeca812c90b29e https://doi.org/10.1016/j.mssp.2022.107023 Zobrazit plný text záznamu Full Text from ScienceDirect