Comparative evaluation of indirectly heated cathode DC ion source and inductively coupled plasma RF ion source for high current ion implanter

Autor:	Jongjin Hwang, Myoungsoo Choi, Taehwan Kim, Sungmook Jung, Sunghwa Lee, Jisoo Lee, K. T. Hwang, H. Choi, Ho-Jun Lee
Rok vydání:	2023
Předmět:	Mechanics of Materials Mechanical Engineering General Materials Science Condensed Matter Physics
Zdroj:	MRS Advances. 7:1338-1342
ISSN:	2059-8521
DOI:	10.1557/s43580-022-00480-3
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d4827159e62e18f1a7af3dd19e7de36f https://doi.org/10.1557/s43580-022-00480-3 Zobrazit plný text záznamu Full text from SpringerLink