Autor:	M. E. Law
Rok vydání:	2002
Předmět:	Engineering Process modeling General Computer Science business.industry Systems engineering State (computer science) Current (fluid) business
Zdroj:	IBM Journal of Research and Development. 46:339-346
ISSN:	0018-8646
Popis:	Process modeling is an integral portion of technology computer-aided design (TCAD) and can be used to predict device structures and doping. Truly predictive process modeling has proven to be an elusive goal, because the controlling physics is complicated and difficult to investigate experimentally. The current state of process modeling is reviewed, and current and future challenges are discussed. Recent helpful trends are indicated, and problems that must be addressed are identified.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d45aeeff490b5b40bb70c15b2b81e68e https://doi.org/10.1147/rd.462.0339 Zobrazit plný text záznamu