Current dependent performance test used on different types of silicon field emitter arrays

Autor:	Michael Bachmann, Rupert Schreiner, Manuel Meyer, M. Dudek, Andreas Pahlke, Walter Hansch, Andreas Schels, Florian Herdl, Felix Düsberg, M. Eder, Simon Edler
Rok vydání:	2021
Předmět:	Materials science Fabrication Dopant Silicon Field (physics) business.industry Doping chemistry.chemical_element Conductivity chemistry Physics::Accelerator Physics Optoelectronics Current (fluid) business Common emitter
Zdroj:	2021 34th International Vacuum Nanoelectronics Conference (IVNC).
DOI:	10.1109/ivnc52431.2021.9600787
Popis:	A current dependent performance test is used to investigate the influence of doping and emitter geometry on the lifetime of silicon field emitter arrays. The measurements reveal an improved performance for lower n-type dopant concentrations. Furthermore, two new types of field emitters are introduced by slightly varying the original fabrication process [1]. The comparison shows superiority of tip like emitters over blade like structures.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d4592212cc4accc67e92cfdb57fd6b00 https://doi.org/10.1109/ivnc52431.2021.9600787 Zobrazit plný text záznamu