Enabling Next Generation 3D Heterogeneous Integration Architectures on Intel Process
Autor: | A. Elsherbini, K. Jun, S. Liff, T. Talukdar, J. Bielefeld, W. Li, R. Vreeland, H. Niazi, B. Rawlings, T. Ajayi, N. Tsunoda, T. Hoff, C. Woods, G. Pasdast, S. Tiagaraj, E. Kabir, Y. Shi, W. Brezinski, R. Jordan, J. Ng, X. Brun, B. Krisnatreya, P. Liu, B. Zhang, Z. Qian, M. Goel, J. Swan, G. Yin, C. Pelto, J. Torres, P. Fischer |
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Rok vydání: | 2022 |
Zdroj: | 2022 International Electron Devices Meeting (IEDM). |
DOI: | 10.1109/iedm45625.2022.10019499 |
Databáze: | OpenAIRE |
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