Influence of substrate conductivity type on the thickness and composition of epitaxial layers grown by Liquid Phase Epitaxy
Autor: | G. Juárez-Díaz, F. de Anda, V.H. Compeán-Jasso, E. Momox-Beristain, J. Martínez-Juárez, V.A. Mishurnyi |
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Rok vydání: | 2011 |
Předmět: |
Chromatography
Materials science business.industry Growth kinetics Metals and Alloys Liquid phase Surfaces and Interfaces Substrate (electronics) Conductivity Epitaxy Surfaces Coatings and Films Electronic Optical and Magnetic Materials Materials Chemistry Optoelectronics Composition (visual arts) business |
Zdroj: | Thin Solid Films. 520:700-702 |
ISSN: | 0040-6090 |
DOI: | 10.1016/j.tsf.2011.01.352 |
Popis: | It is shown that the conductivity of the substrate has a non negligible effect on the thickness and composition of epitaxial layers grown by Liquid Phase Epitaxy. The growth experiments have been done on the systems GaAs/GaAs, GaAlSb/GaSb and GaInAsSb/GaSb. To insure strictly the same growth conditions the growth was done simultaneously, from the same liquid phase, on the different substrates. |
Databáze: | OpenAIRE |
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