Influence of substrate conductivity type on the thickness and composition of epitaxial layers grown by Liquid Phase Epitaxy

Autor: G. Juárez-Díaz, F. de Anda, V.H. Compeán-Jasso, E. Momox-Beristain, J. Martínez-Juárez, V.A. Mishurnyi
Rok vydání: 2011
Předmět:
Zdroj: Thin Solid Films. 520:700-702
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.01.352
Popis: It is shown that the conductivity of the substrate has a non negligible effect on the thickness and composition of epitaxial layers grown by Liquid Phase Epitaxy. The growth experiments have been done on the systems GaAs/GaAs, GaAlSb/GaSb and GaInAsSb/GaSb. To insure strictly the same growth conditions the growth was done simultaneously, from the same liquid phase, on the different substrates.
Databáze: OpenAIRE