A versatile heterodyne interferometer for vibration measurement and analysis of micro-structures

Autor:	Yujian Hong, Junsheng Lu, Xinyu Chang, Yanan Zeng, Xiaodong Hu, Yuan Yang
Rok vydání:	2020
Předmět:	Optics Materials science business.industry Vibration measurement General Engineering General Physics and Astronomy business Micro structure Heterodyne interferometer
Zdroj:	Applied Physics Express. 13:026507
ISSN:	1882-0786 1882-0778
DOI:	10.35848/1882-0786/ab6ca7
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d426bb998cb9c826b49c941cb4891cb9 https://doi.org/10.35848/1882-0786/ab6ca7 Zobrazit plný text záznamu