AlScN‐on‐SiC Thin Film Micromachined Resonant Transducers Operating in High‐Temperature Environment up to 600 °C

Autor:	Wen Sui, Haoran Wang, Jaesung Lee, Afzaal Qamar, Mina Rais‐Zadeh, Philip X.‐L. Feng
Rok vydání:	2022
Předmět:	Biomaterials Electrochemistry Condensed Matter Physics Electronic Optical and Magnetic Materials
Zdroj:	Advanced Functional Materials. 32:2202204
ISSN:	1616-3028 1616-301X
DOI:	10.1002/adfm.202202204
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d40e8d7ed8efa6b4932094c116bab36d https://doi.org/10.1002/adfm.202202204 Zobrazit plný text záznamu Plný text