Characterization of highly textured piezoelectric AlN films obtained from aluminum and ammonium chloride by a simple vapor deposition process
| Autor: | A. N. Red’kin, Vitaly I. Korepanov, Dmitry Roshchupkin, E. E. Yakimov |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science Piezoelectric coefficient Metals and Alloys Analytical chemistry Cathodoluminescence 02 engineering and technology Surfaces and Interfaces Chemical vapor deposition 021001 nanoscience & nanotechnology Microstructure 01 natural sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials symbols.namesake 0103 physical sciences Materials Chemistry symbols Deposition (phase transition) Crystallite Thin film 0210 nano-technology Raman spectroscopy |
| Zdroj: | Thin Solid Films. 684:15-20 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2019.05.049 |
| Popis: | We report a simple and efficient deposition technique for the growth of highly-textured AlN thin films. The proposed chloride-based chemical vapor deposition approach is based on widely available precursors and an unsophisticated experimental set-up. The films were characterized by electron microscopy, X-ray diffraction, Raman spectroscopy and cathodoluminescence. We studied the correlations between the deposition conditions and the properties of the resulting films, such as morphology, microstructure, features of the Raman spectra, and piezoelectric characteristics. In particular, we show that the minimum of the Raman bands A1(TO)/ E2(h) intensity ratio, under excitation along c-axis, corresponds to the maximum of the piezoelectric coefficient. The films deposited under the optimized conditions are composed of well-aligned column-like crystallites. These films have a piezoelectric coefficient of 5.5–6.5 pC/N, which approaches the highest values reported for this material. The simplicity, efficiency and high quality of the resulting films make the proposed deposition approach highly interesting for a wide range of practical applications. |
| Databáze: | OpenAIRE |
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