Scaleup of Cu(InGa)Se2 Thin-Film Coevaporative Physical Vapor Deposition Process, 2. Evaporation Source Design

Autor:	Erten Eser, Babatunde A. Ogunnaike, Shannon Fields, Robert W. Birkmire, Kapil Mukati
Rok vydání:	2009
Předmět:	Materials science General Chemical Engineering Nuclear engineering Nozzle Evaporation Nanotechnology General Chemistry Process variable Industrial and Manufacturing Engineering Scientific method Physical vapor deposition Energy transformation Direct simulation Monte Carlo Thin film
Zdroj:	Industrial & Engineering Chemistry Research. 48:5992-5999
ISSN:	1520-5045 0888-5885
Popis:	We recently presented the development and experimental validation of two models that are essential for effective commercial-scale source design for Cu(InGa)Se2 thin film coevaporative physical vapor deposition processes: a three-dimensional thermal model of the evaporation source, and a Direct Simulation Monte Carlo (DSMC)-method-based effusion model. We showed that these models can be used to obtain reasonably accurate melt temperature dynamics and nozzle effusion flow properties. We now present how these simulation tools are used to develop a scale-up methodology for the effective commercialization of the pilot-scale physical vapor deposition (PVD) process at the University of Delaware’s Institute of Energy Conversion (IEC). We illustrate the methodology using two commercial-scale source design studies: a three-nozzle single source and a four-nozzle modular source. We also show that the proposed source designs are robust to modeling errors and the important process parameter of the source-to-substrate d...
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d374cba3f1f753e9426374c0deb7d398 https://doi.org/10.1021/ie801596a Zobrazit plný text záznamu