A Monolithic Amorphous-Selenium/CMOS Single-Photon-Counting X-Ray Detector
| Autor: | Peter M. Levine, Abdallah El-Falou, Karim S. Karim, Reza Mohammadi, Ahmet Camlica |
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| Rok vydání: | 2021 |
| Předmět: |
010302 applied physics
Materials science Pixel Physics::Instrumentation and Detectors business.industry Detector X-ray detector 01 natural sciences Photon counting Dot pitch Electronic Optical and Magnetic Materials Readout integrated circuit CMOS 0103 physical sciences Optoelectronics Electrical and Electronic Engineering Photonics business |
| Zdroj: | IEEE Transactions on Electron Devices. 68:1746-1752 |
| ISSN: | 1557-9646 0018-9383 |
| Popis: | We report on the design and characterization of a monolithic single-photon-counting (SPC) X-ray detector integrating an amorphous semiconductor sensor. Our prototype combines amorphous selenium (a-Se), a well-known photoconductor, with a CMOS readout integrated circuit (ROIC) containing two $26\times196$ arrays of single-energy-threshold pixels. We achieve high spatial resolution for capturing single 60-keV photons by implementing 11.4- $\mu \text{m}$ -pitch pixels and by integrating a 70- $\mu \text{m}$ -thick a-Se sensor on the ROIC. We present experimental SPC results using a mono-energetic 60-keV radioactive source. Our results also suggest that our prototype a-Se/CMOS detector leverages the small-pixel effect (SPE) due to the large ratio of a-Se thickness to pixel pitch. This effect could overcome the slow inherent transient response of a-Se for high count rate X-ray diagnostic applications like mammography. |
| Databáze: | OpenAIRE |
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