Investigation of the Structure and Optical Properties of Thin Copper Films
| Autor: | O. Machulianskyi, M. Rodionov, V. Machulianskyi, O. Borisova, Yuriy Yakymenko, B. Babych, V. Verbitskiy |
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| Rok vydání: | 2018 |
| Předmět: |
Materials science
Silicon business.industry Wavelength range Direct current chemistry.chemical_element 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences Copper Spectral line 0104 chemical sciences Reflection (mathematics) chemistry Sputtering Optoelectronics 0210 nano-technology business Quartz |
| Zdroj: | 2018 IEEE 38th International Conference on Electronics and Nanotechnology (ELNANO). |
| DOI: | 10.1109/elnano.2018.8477448 |
| Popis: | Copper nanolayers were formed using the vacuum magnetron-assisted sputtering (direct current) in various technological modes (sedimentation speed, working pressure, discharge power). Results of microstructural study of the 1 nm to 65 nm thick copper nanofilms deposited on quartz, glass and silicon substrates are presented. Spectra of transmission and reflection coefficients of the copper nanofilms were studied in the wavelength range from $0.2\ \mu\text{m}$ to $1.1\ \mu\text{m}$ , The transmission and reflection spectra of films correspond well to the known spectra of bulk materials. The obtained results are of practical importance for development of nanostructural systems with the preset optical properties and for design of functional devices to be used in optoelectronics, information and energy-saving technologies. |
| Databáze: | OpenAIRE |
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