Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching

Autor:	Che-Heung Kim, Yong-Kweon Kim, Seong-Hyok Kim, June-Young Lee, Hyung-Taek Lim
Rok vydání:	2001
Předmět:	Nonlinear system Materials science Acoustics Optical engineering Electrode Process (computing) Static displacement Deep reactive-ion etching Biasing Actuator
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
Popis:	The comb actuator deformed by microloading effect in DRIE process generally has ½L© shape comb electrodes. Therefore, the actuator shows nonlinear differential driving characteristics. A simple modeling is suggested and simulated to explain the driving characteristics. For modeling convenience, the damaged comb electrode is assumed to be a simple ½L© shape. According to the modeling, the resonant frequency is estimated to increase as the bias voltage increases. The static displacement curve shows ½S© shape.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d3539532df344da389406feadf89b26a https://doi.org/10.1117/12.442952 Zobrazit plný text záznamu