Popis: |
The comb actuator deformed by microloading effect in DRIE process generally has ½L© shape comb electrodes. Therefore, the actuator shows nonlinear differential driving characteristics. A simple modeling is suggested and simulated to explain the driving characteristics. For modeling convenience, the damaged comb electrode is assumed to be a simple ½L© shape. According to the modeling, the resonant frequency is estimated to increase as the bias voltage increases. The static displacement curve shows ½S© shape.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only. |