Influence of Hf precursor concentration on various properties of sol-gel based spin coated HfO2 thin films

Autor:	null Sabhya, Akshayakumar Kompa, Dhananjaya Kekuda, M.S. Murari, K. Mohan Rao
Rok vydání:	2023
Předmět:	Inorganic Chemistry Organic Chemistry Electrical and Electronic Engineering Physical and Theoretical Chemistry Atomic and Molecular Physics and Optics Spectroscopy Electronic Optical and Magnetic Materials
Zdroj:	Optical Materials. 136:113424
ISSN:	0925-3467
DOI:	10.1016/j.optmat.2022.113424
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d2f27e463b7fca1e5183818f401fb3b5 https://doi.org/10.1016/j.optmat.2022.113424 Zobrazit plný text záznamu Full Text from ScienceDirect