New Insulator Film Of Integrated Capacitor For Silicon Strip Detector

Autor:	Y. Fujita, Shigeki Mori, K. Yusa, Yasuo Higashi, Masaaki Mandai, S. Koike, Tomohiro Matsuda, T. Tsuboyama, H. Hanai, Hitomi Ikeda, Chikara Fukunaga, Yoshikazu Kojima, Junko Yamanaka, M. H. Tanaka, J. Haba, Masaaki Kamiya, H. Kanazawa, H. Ozaki, Yutaka Saitoh, S. Okuno, Hitoshi Takeuchi, Y. Ishihara, Mitsuo Ikeda, Tadao Akamine, S. Miyahara, S. Avrillon
Rok vydání:	2005
Předmět:	Materials science Silicon business.industry Hybrid silicon laser Detector Silicon on insulator chemistry.chemical_element Insulator (electricity) STRIPS Capacitance law.invention Capacitor chemistry law Optoelectronics business
Zdroj:	1993 IEEE Conference Record Nuclear Science Symposium and Medical Imaging Conference.
DOI:	10.1109/nssmic.1993.701650
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d29683d4f7f46165e961a7caab95a4f3 https://doi.org/10.1109/nssmic.1993.701650 Zobrazit plný text záznamu