Mechanical Behavior of Methyl-Silsesquioxane Based Nano Porous Low-K Film Using by Ultraviolet Curing Method

Autor:	Keunwon Kang, EunMi Choi, Areum Kim, Soon Hyeong Kwon, Sung Gyu Pyo, Minwoo Nam, Longshou Zheng
Rok vydání:	2016
Předmět:	Nano porous chemistry.chemical_compound Materials science chemistry medicine General Materials Science Composite material medicine.disease_cause Curing (chemistry) Ultraviolet Silsesquioxane
Zdroj:	Science of Advanced Materials. 8:1963-1967
ISSN:	1947-2935
DOI:	10.1166/sam.2016.2857
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d28d98faf40117193eccf99780f947ac https://doi.org/10.1166/sam.2016.2857 Zobrazit plný text záznamu