An experimental investigation of the theory of electrostatic deflections
| Autor: | John A. Pelesko, Javed Siddique, Robert Deaton, Eric Sabo |
|---|---|
| Rok vydání: | 2011 |
| Předmět: |
Microelectromechanical systems
Physics Nanoelectromechanical systems Mechanics Condensed Matter Physics Critical value Instability Mechanical components Surfaces Coatings and Films Electronic Optical and Magnetic Materials Elastic membrane Classical mechanics Electrical and Electronic Engineering Biotechnology Voltage |
| Zdroj: | Journal of Electrostatics. 69:1-6 |
| ISSN: | 0304-3886 |
| DOI: | 10.1016/j.elstat.2010.10.007 |
| Popis: | The so-called “pull-in” instability is a ubiquitous feature of electrostatic actuation. In systems where an applied voltage is used to actuate or move mechanical components, it is observed that when the applied voltage exceeds a critical value, electrostatic forces become dominant over elastic forces and the mechanical components “pull-in” or collapse into one another. Here, key theoretical results concerning this instability are surveyed and compared to a new experimental study of electrostatic deflections. Gaps between theory and experiment are uncovered and directions for future modeling and analysis indicated. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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