Impact of rapid thermal annealing on structural and sensing properties of Ni–Ti sensitive films for extended-gate field-effect transistor pH sensors

Autor:	Tung-Ming Pan, Chih-Hsiang Yang, See-Tong Pang
Rok vydání:	2023
Předmět:	General Physics and Astronomy Surfaces and Interfaces General Chemistry Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	Surfaces and Interfaces. 39:102993
ISSN:	2468-0230
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d254e741e1c38ff7b19f38c3eeb2711c https://doi.org/10.1016/j.surfin.2023.102993 Zobrazit plný text záznamu Full Text from ScienceDirect