Study on Fabrication Method for Narrow Pitch Beams on Silicon Probe

Autor:	Takanori Aono, Masatoshi Kanamaru, Ryuji Kohno, Atsushi Hosogane
Rok vydání:	2021
Předmět:	Materials science Fabrication Silicon chemistry business.industry Mechanical Engineering Optoelectronics chemistry.chemical_element Electrical and Electronic Engineering business
Zdroj:	IEEJ Transactions on Sensors and Micromachines. 141:96-102
ISSN:	1347-5525 1341-8939
DOI:	10.1541/ieejsmas.141.96
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d22a6077b9e1b537e0079f453ee7fac2 https://doi.org/10.1541/ieejsmas.141.96 Zobrazit plný text záznamu