Speckle in coherent x-ray reflectivity from Si(111) wafers

Autor:	Ian K. Robinson, Ron Pindak, Dierker Sb, J. L. Libbert
Rok vydání:	1997
Předmět:	Length scale Physics business.industry Wiggler Momentum transfer Synchrotron radiation law.invention X-ray reflectivity Speckle pattern Optics law Specular reflection business Monochromator
Zdroj:	Physical Review B. 56:6454-6457
ISSN:	1095-3795 0163-1829
DOI:	10.1103/physrevb.56.6454
Popis:	We report the observation of x-ray speckle in the reflected beam from Si(111) wafers illuminated at grazing incidence. An intense coherent 8-keV x-ray beam was prepared using a wiggler source and multilayer monochromator optics. We demonstrate that the speckle patterns are specific to the region of the sample that is illuminated. From the trade-off between surface sensitivity and signal as a function of perpendicular momentum transfer, we infer that the speckle is due to the surface morphology on a micrometer length scale. We document and explain the evolution of the speckle patterns from nearly specular at low ${q}_{z}$ to highly structured at larger ${q}_{z}.$
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d21c7ed8a304661a993ee3b0ee074d0f https://doi.org/10.1103/physrevb.56.6454 Zobrazit plný text záznamu