Fabrication of polarization-insensitive, multi-resonant metamaterial absorber using wafer bonding of glass dielectric substrate
| Autor: | Chang-Wook Baek, Kenyu Ling, Sungjoon Lim, Duck-Hyun Lee |
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| Rok vydání: | 2015 |
| Předmět: |
Materials science
Fabrication business.industry Wafer bonding Terahertz radiation Physics::Optics Molar absorptivity Condensed Matter Physics Polarization (waves) Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Resonator Optics Metamaterial absorber Wafer Electrical and Electronic Engineering business |
| Zdroj: | Microelectronic Engineering. 136:42-47 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2015.04.010 |
| Popis: | Display Omitted THz multi-resonant metamaterial absorber using glass wafer bonding is demonstrated.Pyrex glass wafer is used as a dielectric layer for high absorptivity in THz range.Hexagonal comb-shape resonator is used to realize polarization insensitivity.Fabricated absorber shows an absorptivity of 93% and 74%, at 0.98THz and 1.55THz. We present the design, fabrication and characterization of a terahertz multi-resonant metamaterial absorber showing polarization-insensitive characteristics. The proposed absorber uses Pyrex glass as a dielectric layer for higher absorption in a terahertz range and is wafer-level fabricated by thermo-compression bonding technique using gold films as intermediate layers. In addition, an array of comb-shaped hexagonal pattern is introduced as a multi-band LC resonator and symmetric geometry is used for polarization insensitivity. The fabricated absorber shows two absorption peaks at 0.98THz and 1.55THz with the absorptivity of 93% and 74%, respectively, and almost identical responses to the different polarization angles. |
| Databáze: | OpenAIRE |
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