| Popis: |
In certain applications, such as microelectronic manufacturing, monitoring and controlling small floor vibrations can be essential. This paper describes how an array of distributed fiber optic sensors can be used to monitor micro floor vibrations as part of an adaptive control strategy. The performance target is to limit vibrations in the 10 Hz frequency range to less than 10 microinches peak to peak. The distributed fiber optic sensors are of an interferometric design that uses a single mode to multi mode to single mode configuration. The fibers can be arranged in a grid so as to localize vibration hot spots. Data comparing the performance of the vibration sensing array with that of conventional point piezoelectric accelerometers, as well as sensing and control strategies will be presented. |
