A low actuation voltage bistable MEMS switch: design, fabrication and preliminary testing

Autor:	Ildar I. Amirov, Olga M. Koroleva, Victor V. Naumov, Ilya V. Uvarov, Elena I. Vaganova
Rok vydání:	2016
Předmět:	Microelectromechanical systems Resistive touchscreen Fabrication Materials science Bistability business.industry Signal Computer Science::Other Surface micromachining Electronic engineering Optoelectronics business Beam (structure) Voltage
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.2266439
Popis:	Electrostatically actuated MEMS switch with the resistive contact is presented. Design of the switch includes the active contact breaking mechanism, which allows to detach the beam from the signal electrode in case of sticking. The mechanism is realized by the presence of two driving electrodes under the beam. The switch is fabricated by the surface micromachining. Finite element simulation and experimental investigation of the switch in a cold regime are performed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d191f76205488b77a8f5aea8f905391c https://doi.org/10.1117/12.2266439 Zobrazit plný text záznamu