Markov Random Fields in Pattern Recognition for Semiconductor Manufacturing
| Autor: | Michael Baron, Choudur Lakshminarayan, Zhenwu Chen |
|---|---|
| Rok vydání: | 2001 |
| Předmět: |
Statistics and Probability
Spatial correlation Random field Markov random field Markov chain Semiconductor device fabrication Applied Mathematics Variable-order Markov model Conditional probability distribution symbols.namesake Modeling and Simulation Statistics symbols Statistical physics Gibbs sampling Mathematics |
| Zdroj: | Technometrics. 43:66-72 |
| ISSN: | 1537-2723 0040-1706 |
| DOI: | 10.1198/00401700152404336 |
| Popis: | Under the most general conditions of an anisotropic Markov random field, we model the two-dimensional spatial distribution of microchips on a silicon wafer. The proposed model improves on its predecessors as it stipulates the spatial correlation of different strengths in all eight directions. Its canonical parameters represent the intensity of failures, main effects, and interactions of neighboring chips. Explicit forms of conditional distributions are derived, and maximum pseudo-likelihood estimates of canonical parameters are obtained. This numerical characteristic summarizes general patterns of clusters of failing chips on a wafer, capturing their size, shape, direction, density, and thickness. It is used to classify incoming wafers to known root-cause categories by matching them to the closest pattern. |
| Databáze: | OpenAIRE |
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