Investigation of the compositional changes of a Y-Ba-Cu-O HTSC target under ion sputtering

Autor:	E. B. Klyuenkov, A. K. Vorob’ev, D. V. Masterov, M. N. Drozdov, S. V. Gaponov
Rok vydání:	2000
Předmět:	Auger electron spectroscopy Materials science Diffusion Analytical chemistry chemistry.chemical_element Condensed Matter Physics Copper Electronic Optical and Magnetic Materials Auger chemistry Sputtering Cavity magnetron Surface layer Atomic physics Deposition (law)
Zdroj:	Physics of the Solid State. 42:603-608
ISSN:	1090-6460 1063-7834
DOI:	10.1134/1.1131256
Popis:	An Auger electron spectroscopy study is reported of the elemental depth profile of Y-Ba-Cu-O HTSC targets subjected to ion-plasma sputtering in a magnetron deposition system and ion-beam sputtering in the Auger spectrometer chamber. It has been established that the process consists in all cases of predominant copper sputtering accompanied by the formation of a modified surface layer and of a copper-depleted region. This region is assumed to originate from intense copper diffusion from the bulk to the modified surface layer driven by a concentration gradient.
Databáze:	OpenAIRE
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