ATTEMPT OF TARGET SLANTING ON FACING TARGETS SPUTTERING SYSTEM

Autor:	Toyoaki Hirata, Hironobu Muroi, Masao Nagakubo, Masahiko Naoe
Rok vydání:	1991
Předmět:	Materials science Sputtering Electrical and Electronic Engineering Condensed Matter Physics Instrumentation Engineering physics Electronic Optical and Magnetic Materials
Zdroj:	Journal of the Magnetics Society of Japan. 15:S2_939-944
ISSN:	1880-4004 0285-0192
DOI:	10.3379/jmsjmag.15.s2_939
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d0f86f211596ee6e14fd9106e6484782 https://doi.org/10.3379/jmsjmag.15.s2_939 Zobrazit plný text záznamu