Relationship between electric properties and surface flatness of (ZnO)x(InN)1−x films on ZnO templates
| Autor: | Masaharu Shiratani, Koichi Matsushima, Naho Itagaki |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Electron mobility Materials science chemistry.chemical_element Nanotechnology 02 engineering and technology Zinc Surface finish 021001 nanoscience & nanotechnology 01 natural sciences Temperature measurement Root mean square Template chemistry 0103 physical sciences Electric properties Surface flatness Composite material 0210 nano-technology |
| Zdroj: | 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO). |
| DOI: | 10.1109/nano.2016.7751421 |
| Popis: | We have studied effects of deposition temperature on electrical properties of (ZnO) x (InN) 1−x (ZION) films on ZnO templates. With increasing the deposition temperature from RT to 450°C, the electron mobility decreases from 93 cm2/Vs to 70 cm2/Vs and the carrier density increases from 1.8×1019 cm−3 to 3.4×1019 cm−3. Furthermore, we found a correlation between electrical properties and root mean square (RMS) roughness of the films. These results suggest the surface flatness is an important parameter to determine electrical properties of ZION films. |
| Databáze: | OpenAIRE |
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