Electrical Properties of the MOS Capacitor Hydrogen Sensor Based on the Ni/SiO2/Si Structure
| Autor: | G. Behzadi Pour |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Mos capacitor Materials science business.industry 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Hydrogen sensor Electronic Optical and Magnetic Materials 0103 physical sciences Optoelectronics Electrical and Electronic Engineering 0210 nano-technology business |
| Zdroj: | Journal of Nanoelectronics and Optoelectronics. 12:130-135 |
| ISSN: | 1555-1318 1555-130X |
| DOI: | 10.1166/jno.2017.1975 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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