Electrical study of microfluidic channels isolated with chemically modified porous silicon

Autor:	E. Méry, C. Malhaire, D. Barbier, B. Remaki
Rok vydání:	2007
Předmět:	Thermal oxidation Materials science Microfluidic channel Microfluidics Nanotechnology Electrical measurements Condensed Matter Physics Porous silicon Porosity
Zdroj:	physica status solidi c. 4:2098-2102
ISSN:	1610-1642 1862-6351
Popis:	This paper deals with On-Chip-Electrophoresis separation systems micromachined on porous silicon. The electrical insulation properties of the porous substrates were analyzed and related to physical and chemical treatments such as thermal oxidation and silanisation. From this preliminary study, microfluidic devices including silanized porous silicon layers were realized. Finally, ANSYS 3D-Finite Element Modelling of a microfluidic device was performed using experimental data from the electrical measurements. The geometrical and electrical limitations were then discussed. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d046f2c0e1f05ee536e6a42cd56a786a https://doi.org/10.1002/pssc.200674390 Zobrazit plný text záznamu Plný text