Experimental Study of the Influence of CH4 and H2 on the Conformation, Chemical Composition, and Luminescence of Silicon Quantum Dots Inlaid in Silicon Carbide Thin Films Grown by Remote Plasma-Enhanced Chemical Vapor Deposition

Autor:	Rodrigo León-Guillén, Ana Luz Muñoz-Rosas, Jesús A. Arenas-Alatorre, Juan Carlos Alonso-Huitrón, Ana Laura Pérez-Martínez, Arturo Rodríguez-Gómez
Rok vydání:	2022
Předmět:	General Chemical Engineering General Chemistry
Zdroj:	ACS Omega. 7:19640-19647
ISSN:	2470-1343
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d011aaaf7d7b99e208ab774d41fa14ed https://doi.org/10.1021/acsomega.2c01384 Zobrazit plný text záznamu