Characterization of Thin-Film Impact Microactuators

Autor:	Roger L. Hipwell, Richard S. Muller, Albert P. Pisano
Rok vydání:	1997
Zdroj:	Microelectromechanical Systems (MEMS).
DOI:	10.1115/imece1997-0944
Popis:	This paper presents analysis for surface-micromachined, thin-film impact microactuators. Empirical data are given for the characterization of such a linear microactuator. These data include actuator performance trends due to slider design parameters, as well as measurements to model thin-film microscale impact. The impact is modeled by planar impulse-momentum techniques that include the effects of tangential sliding motion between the impactor and the slider during contact. The physical placement and size of the slider guides are shown to affect the magnitude of slider displacement subsequent to impact.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cfeb0dee26b38c70ecfbf4270f421fd0 https://doi.org/10.1115/imece1997-0944 Zobrazit plný text záznamu