AlInAs-GaInAs HEMTs utilizing low-temperature AlInAs buffers grown by MBE

Autor: U.K. Mishra, C.S. Chou, Lawrence E. Larson, M.A. Melendes, M. Thompson, S.E. Rosenbaum, C.E. Hooper, M.J. Delaney, April S. Brown
Rok vydání: 1989
Předmět:
Zdroj: IEEE Electron Device Letters. 10:565-567
ISSN: 1558-0563
0741-3106
DOI: 10.1109/55.43141
Popis: Low-temperature AlInAs buffer layers incorporated in AlInAs-GaInAs HEMT epitaxial layers grown by MBE are discussed. A growth temperature of 150 degrees C followed by a short anneal is shown to eliminate kinks in the device I-V characteristic and sidegating and to reduce the output conductance dramatically. >
Databáze: OpenAIRE