Analytical study of coupling element effect on anchor-limited quality factor in double beam array based sensing devices
| Autor: | Du Xu, Zheng Guowen, Dong F. Wang, Jianguo Chang, Wang Xin |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Coupling
Materials science Substrate coupling Oscillation business.industry Acoustics 010401 analytical chemistry 02 engineering and technology Structural engineering Dissipation 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Finite element method 0104 chemical sciences Electronic Optical and Magnetic Materials Vibration Resonator Hardware and Architecture Electrical and Electronic Engineering 0210 nano-technology business Beam (structure) |
| Zdroj: | Microsystem Technologies. 24:1615-1622 |
| ISSN: | 1432-1858 0946-7076 |
| Popis: | Energy dissipation through anchor points into the substrate is a major loss mechanism in micro- and nano-mechanical resonators. This work explores the effects of coupling element on anchor loss in double beam array. Finite element analysis is used to evaluate anchor-limited quality factors by computing the ratio of the strain energy stored in the array relative to the energy dissipated into the substrate. Four types of double beam arrays attached to the substrate are discussed. Type 1 and type 2, consisting of coupling elements and two identical primary beams with a frequency ratio of 1:1, are designed for sensing applications. It is noted that the quality factor of in-phase vibration mode changes slightly as the coupling element moving close to the substrate, then jumps up as the coupling element completely attached to the substrate. Contrary to type 1 and type 2, type 3 and type 4, consisting of coupling elements and two non-identical primary beams with a frequency ratio of 1:3, are designed for synchronized oscillation-based applications. A similar jump-up of the quality factor is observed again in both first and second vibration modes. This kind of jump-up is applicable to optimizing the structural design of double beam array especially synchronized one, in order to achieve a high quality factor. |
| Databáze: | OpenAIRE |
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