Group-II Hafnate, Zirconate, and Tantalate High-k Dielectrics for MIM Applications: The Defect Issue

Autor:	Piotr Dudek, Christian Wenger, Gunther Lippert, Grzegorz Lupina, Christian Walczyk, Ronny Schmidt, Jarek Dąbrowski, Grzegorz Kozlowski
Rok vydání:	2009
Předmět:	Materials science business.industry Group ii Optoelectronics Dielectric business Zirconate High-κ dielectric Tantalate
Zdroj:	ECS Transactions. 25:219-239
ISSN:	1938-6737 1938-5862
DOI:	10.1149/1.3206622
Popis:	We discuss the role of defects in metal oxides (mostly in strontium hafnate, barium hafnate and barium zirconate). The discussion is based on macroscopic and microscopic (C-AFM) electrical meas-urements, ab initio calculations for formation energies and elec-tronic structure of defects, numerical simulations of trap-assisted leakage, and on additional data provided by SIMS and X-ray tech-niques. We argue that moisture may be a hazardous contaminant.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cf4881cc340de8185dcd612ff86a77dc https://doi.org/10.1149/1.3206622 Zobrazit plný text záznamu