Electron beam patterning for writing of positively charged gold colloidal nanoparticles
| Autor: | David Zitoun, Olga Girshevitz, Zeev Zalevsky, Jonathan Azougi, Hadar Zafri |
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| Rok vydání: | 2018 |
| Předmět: |
Nanostructure
Materials science business.industry Scanning electron microscope Nanoparticle Bioengineering Nanotechnology 02 engineering and technology General Chemistry 010402 general chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Acceleration voltage Atomic and Molecular Physics and Optics 0104 chemical sciences Nanolithography Modeling and Simulation Microelectronics General Materials Science Wafer 0210 nano-technology business Plasmon |
| Zdroj: | Journal of Nanoparticle Research. 20 |
| ISSN: | 1572-896X 1388-0764 |
| DOI: | 10.1007/s11051-018-4129-2 |
| Popis: | Synthesis at the nanoscale has progressed at a very fast pace during the last decades. The main challenge today lies in precise localization to achieve efficient nanofabrication of devices. In the present work, we report on a novel method for the patterning of gold metallic nanoparticles into nanostructures on a silicon-on-insulator (SOI) wafer. The fabrication makes use of relatively accessible equipment, a scanning electron microscope (SEM), and wet chemical synthesis. The electron beam implants electrons into the insulating material, which further anchors the positively charged Au nanoparticles by electrostatic attraction. The novel fabrication method was applied to several substrates useful in microelectronics to add plasmonic particles. The resolution and surface density of the deposition were tuned, respectively, by the electron energy (acceleration voltage) and the dose of electronic irradiation. We easily achieved the smallest written feature of 68 ± 18 nm on SOI, and the technique can be extended to any positively charged nanoparticles, while the resolution is in principle limited by the particle size distribution and the scattering of the electrons in the substrate. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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