Synthesis of zinc oxide films in glow discharge of various configurations

Autor:	V. I. Ratushnyi, I. N. Zakharchenko, N. V. Lyanguzov, S. P. Zinchenko, V. B. Shirokov
Rok vydání:	2014
Předmět:	Glow discharge Materials science Physics and Astronomy (miscellaneous) Silicon Analytical chemistry chemistry.chemical_element Substrate (electronics) Zinc Oxygen Cathode law.invention chemistry law Torr Electrode
Zdroj:	Technical Physics Letters. 40:1018-1020
ISSN:	1090-6533 1063-7850
DOI:	10.1134/s1063785014110315
Popis:	The structure of zinc oxide (ZnO) films deposited on silicon substrates using dc glow discharge in oxygen have been studied for two electrode configurations—with tubular (hollow) and planar cathodes. At a substrate temperature of 670 K and oxygen pressure of 0.5 Torr, ZnO films synthesized in the hollow cathode geometry possess a columnar structure, while those obtained in the planar geometry are continuous. A decrease in the oxygen pressure from 0.5 to 0.2 Torr in discharge with the hollow cathode geometry leads to a change from a columnar to continuous film structure, while the morphology of films obtained in the planar geometry remains unchanged. The synthesized films exhibit a high degree of crystallographic orientation [001]ZnO ‖ [001]Si with complete azimuthal disorientation in the plane of film conjugation with the substrate.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cefa45d211497ea93a5427fac2b2f45c https://doi.org/10.1134/s1063785014110315 Zobrazit plný text záznamu Plný text ve formátu PDF