A comparative study of plasma parameters and gas phase compositions in Cl2 and HCl direct current glow discharges
| Autor: | V.I. Svettsov, D.V. Sitanov, Alexander Efremov, D.I. Balashov |
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| Rok vydání: | 2008 |
| Předmět: |
Plasma parameters
Chemistry Direct current Metals and Alloys Analytical chemistry Surfaces and Interfaces Plasma Plasma modeling Dissociation (chemistry) Surfaces Coatings and Films Electronic Optical and Magnetic Materials Electronegativity symbols.namesake Physics::Plasma Physics Materials Chemistry symbols Langmuir probe Physical chemistry Plasma diagnostics |
| Zdroj: | Thin Solid Films. 516:3020-3027 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2007.11.046 |
| Popis: | The investigations of plasma parameters and active particles kinetics in Cl 2 and HCl direct current glow discharges ( p = 40–300 Pa, j d = 8.5 × 10 − 3 A/cm 2 ) were carried out. The investigation combined plasma diagnostics by Langmuir probes, absorption spectroscopy and self-consistent 0-dimensional plasma modeling based on the solution of Boltzmann kinetic equation. It was found that the model provides an outstanding agreement with experiment on the reduced electric field strength ( E/N ), Cl atom density and the total flux of positive ions and thus, gives an adequate description of basic kinetic effects determining the steady-state plasma parameters and composition. Under the same operating conditions, Cl 2 plasma provides higher E/N , mean electron energy, dissociation degree and electronegativity that can be explained by the peculiarities of formation-decay kinetics analyzed in both systems. |
| Databáze: | OpenAIRE |
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