Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry
| Autor: | Christophe Gorecki, Patrice Lemoal, Luc Froehly, Nicolas Passilly, Justine Lullin, Stéphane Perrin, Jorge Albero, Sylwester Bargiel, Franck Lardet-Vieudrin |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Microelectromechanical systems
Materials science medicine.diagnostic_test business.industry Microscanner 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences 010309 optics Interferometry Optics Optical coherence tomography Comb drive 0103 physical sciences Astronomical interferometer medicine Deep reactive-ion etching Vertical displacement 0210 nano-technology business |
| Zdroj: | SPIE Proceedings. |
| ISSN: | 0277-786X |
| DOI: | 10.1117/12.2230487 |
| Popis: | In this paper, we present construction, fabrication and characterization of an electrostatic MOEMS vertical microscanner for generation of an optical phase shift in array-type interferometric microsystems. The microscanner employs asymmetric comb-drives for a vertical displacement of a large 4x4 array of reference micromirrors and for in-situ position sensing. The device is designed to be fully compatible with Mirau configuration and with vertical integration strategy. This enables further integration of the device within an "active" multi-channel Mirau micro-interferometer and implementation of the phase shifting interferometry (PSI) technique for imaging applications. The combination of micro-interferometer and PSI is particularly interesting in the swept-source optical coherence tomography, since it allows not only strong size reduction of a system but also improvement of its performance (sensitivity, removal of the image artefacts). The technology of device is based on double-side DRIE of SOI wafer and vapor HF releasing of the suspended platform. In the static mode, the device provides vertical displacement of micromirrors up to 2.8μm (0 - 40V), whereas at resonance (fo=500 Hz), it reaches 0.7 μm for only 1VDC+1VAC. In both operation modes, the measured displacement is much more than required for PSI implementation (352nm peak-to-peak). The presented device is a key component of array-type Mirau micro-interferometer that enables the construction of portable, low-cost interferometric systems, e.g. for in vivo medical diagnostics. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|