| Autor: |
Hong-Bae Jung, Jung-Joon Ahn, Wook Bahng, Sang-Chul Kim, Sang-Mo Koo, Nam-Kyun Kim |
| Rok vydání: |
2010 |
| Předmět: |
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| Zdroj: |
Journal of the Korean Institute of Electrical and Electronic Material Engineers. 23:513-516 |
| ISSN: |
1226-7945 |
| DOI: |
10.4313/jkem.2010.23.7.513 |
| Popis: |
In this work, a study is presented of the static characteristics of 4H-SiC DMOSFETs obtained by adjustment of the p-base region. The structure of this MOSFET was designed by the use of a device simulator (ATLAS, Silvaco.). The static characteristics of SiC DMOSFETs such as the blocking voltages, threshold voltages, on-resistances, and figures of merit were obtained as a function of variations in p-base doping concentration from 1 × 10 17 cm to 5 × 10 cm and doping depth from 0.5 μm to 1.0 μm. It was found that the doping concentration and the depth of P-base region have a close relation with the blocking and threshold voltages. For that reason, silicon carbide DMOSFET structures with highly intensified blocking voltages with good figures of merit can be achieved by adjustment of the p-base depth and doping concentration. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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