Polycrystalline tungsten and iridium probe tip preparation with a Ga+ focused ion beam

Autor:	M. J. Vasile, L. C. Hopkins, Lloyd R. Harriott, J. E. Griffith
Rok vydání:	1995
Předmět:	Fabrication Microscope Materials science Ion beam business.industry General Engineering Analytical chemistry chemistry.chemical_element Conical surface Tungsten Focused ion beam law.invention Field electron emission Ion beam deposition Optics chemistry law business
Zdroj:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 13:335
ISSN:	0734-211X
DOI:	10.1116/1.588376
Popis:	We have used a Ga+ focused ion beam (FIB) milling technique to produce sharp scanning‐probe microscope tips. The FIB procedure employs a roughly 0.2‐μm‐diam 20 keV Ga ion beam vector scanned in an annular pattern across the apex of an electrochemically etched wire. This method usually produces exceptionally sharp conical tips, but occasionally it generates a nearly cylindrical spike at the apex. In this paper, we show examples of the spikes, and we discuss possible mechanisms by which they are produced.
Databáze:	OpenAIRE
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