Influences of annealing temperature on the optical and structural properties of (Ba,Sr)TiO3 thin films derived from sol–gel technique

Autor: Changho Lee, Ai Li Ding, Kwangsoo No, Jongwan Choi, Hu Yong Tian, Wei Jen Luo
Rok vydání: 2002
Předmět:
Zdroj: Thin Solid Films. 408:200-205
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(02)00046-9
Popis: Amorphous and polycrystalline Ba 0.9 Sr 0.1 TiO 3 thin films were deposited on Si(100) and fused quartz substrates by a modified sol–gel technique. X-Ray diffraction analysis clearly shows the formation of a perovskite structure at approximately 700 °C. An amorphous nature was found for films annealed below 600 °C, and their inferior crystallinity suggested the formation of an incomplete perovskite phase. The dominant surface feature was a cone-like protrusion observed by atomic force microscopy. The average grain size was approximately 70 nm for the film annealed at 700 °C. The optical constants were determined from spectrophotometric measurements of the transmittance in the wavelength regime of 200–900 nm at room temperature. The effects of the annealing temperature on the optical and structural properties of the films were investigated.
Databáze: OpenAIRE