Fabrication of Electret Using Soft X-ray Irradiation for Silicon Microphone

Autor:	Kenichi Kidokoro, Yoshinori Iguchi, Masahide Goto, Yoshinobu Yasuno, Kei Hagiwara, Hidekazu Kodama, Toshifumi Tajima
Rok vydání:	2010
Předmět:	Microelectromechanical systems Fabrication Materials science Silicon Microphone Acoustics chemistry.chemical_element Biasing Dielectric Computer Science Applications chemistry Hardware_GENERAL Media Technology Electret Electrical and Electronic Engineering Sensitivity (electronics)
Zdroj:	The Journal of The Institute of Image Information and Television Engineers. 64:1003-1006
ISSN:	1881-6908 1342-6907
DOI:	10.3169/itej.64.1003
Popis:	To develop an ultraminiature high-performance microphone for the next generation, we have been studying a silicon microphone. We previously fabricated a single-crystalline silicon microphone using original MEMS technology. The prototype microphone showed excellent acoustic characteristics such as high sensitivity and wide frequency range. Aiming at low-voltage operation, we have recently developed a novel electret charging technique using soft X-ray irradiation. This technique leads to removing the 48-V bias voltage. Experimental results show that an internal inorganic dielectric film keeps electric charges and has excellent heat resistance. This technique exhibits promise for developing a low-voltage operation silicon microphone for purposes ranging from broadcasting to consumer use.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cd9bb58d0fb046e9b5186cc4cacfa49f https://doi.org/10.3169/itej.64.1003 Zobrazit plný text záznamu