Nano-ablation of inorganic materials using laser plasma soft X-rays at around 10 nm

Autor:	T. Makimura, H. Miyamoto, S. Uchida, H. Niinot, K. Murakami
Rok vydání:	2005
Zdroj:	Digest of Papers Microprocesses and Nanotechnology 2005.
DOI:	10.1109/imnc.2005.203778
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cd99206acd729a98bdc5fa4255b7e211 https://doi.org/10.1109/imnc.2005.203778 Zobrazit plný text záznamu