The Use of LEXES to Measure the Chemical Composition of In Situ Doped Epitaxial SiGe and SiC for High Performance CMOS Technology
| Autor: | Mona P. Moret, Hugues Francois-Saint-Cyr, Chrystel Hombourger, Judson Holt, Frank Zhu, Paul Ronsheim, Dmitriy Shneyder, David Snoeyenbos, Michel Schuhmacher |
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| Rok vydání: | 2010 |
| Zdroj: | ECS Meeting Abstracts. :1961-1961 |
| ISSN: | 2151-2043 |
| DOI: | 10.1149/ma2010-02/30/1961 |
| Popis: | not Available. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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