Analysis of unstable species incyclo-C4F8 plasma by ion attachment mass spectrometry

Autor:	Masao Takayanagi, Megumi Nakamura, Munetaka Nakata, Yoshiro Shiokawa, Yoshiki Hirano
Rok vydání:	2006
Předmět:	Ion-attachment mass spectrometry Chemistry Radical Mass spectrum Analytical chemistry Molecule Plasma diagnostics Surfaces and Interfaces Plasma Condensed Matter Physics Mass spectrometry Surfaces Coatings and Films Ion
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 24:385-389
ISSN:	1520-8559 0734-2101
Popis:	Ion attachment mass spectrometry (IAMS) was used to analyze the species in cyclo-C4F8 plasma quantitatively. Not only stable neutral molecules but also less stable radicals were detected. Ions and species without a charge in the plasma were perfectly distinguishable. The measured dependence of the product distribution on the rf power shows that IAMS can be used to clarify and control the processes in the plasma.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::cd8d32197e4466587a8cc1507055d474 https://doi.org/10.1116/1.2177228 Zobrazit plný text záznamu