Extreme-ultraviolet-induced carbon growth at contaminant pressures between 10−10 and 10−6 mbar: Experiment and model
| Autor: | Charles S. Tarrio, Robert F. Berg, Thomas B. Lucatorto, Shannon B. Hill |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Materials science
010504 meteorology & atmospheric sciences Extreme ultraviolet lithography chemistry.chemical_element Surfaces and Interfaces Partial pressure Condensed Matter Physics medicine.disease_cause 01 natural sciences Surfaces Coatings and Films chemistry.chemical_compound chemistry Orders of magnitude (specific energy) Chemical physics Extreme ultraviolet 0103 physical sciences medicine 010303 astronomy & astrophysics Lithography Carbon Ultraviolet 0105 earth and related environmental sciences Tetradecane |
| Zdroj: | Journal of Vacuum Science & Technology A. 38:063201 |
| ISSN: | 1520-8559 0734-2101 |
| Popis: | Carbon contamination induced by ultraviolet (UV) radiation affects precision optics in applications as diverse as semiconductor lithography and satellite observations of the Sun. Our previous experiments have shown that low-intensity UV-induced surface contamination depends quasilogarithmically on the partial pressure of the organic contaminant due to the polydispersive nature of the surface-adsorbate system. This complex dependence presents difficulties because, without a physically motivated model, it cannot be extrapolated to low pressures. We present measurements and a model of carbon growth induced by UV exposure in the presence of tetradecane vapor. The model, which includes a coverage-dependent adsorption energy, describes the measurements over four orders of magnitude in pressure, and we expect that it can be extrapolated to the lower pressures of interest to the extreme ultraviolet lithography and solar astronomy communities. Our experience with other contaminants leads us to expect that other organic contaminants will behave similar to tetradecane. The results also provide insights into the kinetics governing coverage isotherms at extremely low partial pressures. |
| Databáze: | OpenAIRE |
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