Programmable set-up for electrochemical preparation of STM tips and ultra-sharp field emission cathodes

Autor: Dinara Sobola, Jiří Sýkora, Alexandr Knápek, Jana Chlumská
Rok vydání: 2017
Předmět:
Zdroj: Microelectronic Engineering. 173:42-47
ISSN: 0167-9317
DOI: 10.1016/j.mee.2017.04.002
Popis: This paper describes a newly designed set-up which is intended for automated preparation both for STM tips and for ultra-sharp field emission cathodes made of polycrystalline and single crystal tungsten in laboratory conditions. The newly designed set-up incorporates electrochemical etching of a wire in the surface layer of an electrolyte and also the so called drop-off method which consists of two steps and requires more precise wire and current setting. Additionally, the method was extended for polycrystalline wires of tungsten using a special cut-off algorithm, which deals with variable etching speed for various crystallographic orientation of the current grain. Produced tips are examined using scanning low energy electron microscopy as for the surface and by the occurrence of electron field-emission as for the geometry based on the Fowler-Nordheim analysis. STM performance of the produced tip is discussed and examined as well.
Databáze: OpenAIRE