Modeling and simulating the nucleation of amorphous or crystalline films of diamond-like materials
| Autor: | B. M. Sinel’nikov, V. A. Tarala |
|---|---|
| Rok vydání: | 2011 |
| Předmět: |
Materials science
Nucleation chemistry.chemical_element Diamond engineering.material Condensed Matter Physics Microstructure Electronic Optical and Magnetic Materials Amorphous solid chemistry Chemical physics Monolayer Materials Chemistry engineering Deposition (phase transition) Physical chemistry Electrical and Electronic Engineering Carbon Superstructure (condensed matter) |
| Zdroj: | Russian Microelectronics. 40:578-586 |
| ISSN: | 1608-3415 1063-7397 |
| Popis: | The paper is concerned with the modeling and simulation of film nucleation and growth in the case of diamond-like deposition of materials on a (100) surface. Semi-empirical methods of computational quantum chemistry are used to estimate the potential energies of carbon clusters, on whose basis possible mechanisms of monolayer growth are investigated and the influence of temperature and pressure on a film microstructure is assessed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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