THICK PHOTORESIST ORIGINAL MASTER: A NEW TOOL FOR FABRICATION OF POLYMERIC OPTICAL WAVEGUIDES WITH LARGE CORE BY HOT EMBOSSING
| Autor: | Yuka Ohe, Hirotaka Mizuno, Toshikuni Kaino, Masahito Hoshino, Naomichi Okamoto, Okihiro Sugihara |
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| Rok vydání: | 2004 |
| Předmět: |
Optical fiber
Materials science Fabrication Physics and Astronomy (miscellaneous) Epoxy Photoresist Silicone rubber medicine.disease_cause Ridge (differential geometry) Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention chemistry.chemical_compound chemistry law Mold visual_art medicine visual_art.visual_art_medium Composite material Groove (music) |
| Zdroj: | Journal of Nonlinear Optical Physics & Materials. 13:513-517 |
| ISSN: | 1793-6624 0218-8635 |
| DOI: | 10.1142/s0218863504002183 |
| Popis: | A simple and low-cost fabrication method of polymeric optical waveguides with large core sizes for plastic optical fibers is presented. The waveguides are fabricated by hot embossing with a rectangular ridge ultraviolet (UV)-cured epoxy resin stamper. The stamper is fabricated by replication of a rectangular groove mold that is made from silicone rubber replicated from a rectangular ridge original master made from thick photoresist (SU-8). A rectangular ridge shape of the original photoresist master of 1 mm size was realized by using a flattening process, which involves hot embossing before the exposure process and using a UV-cut filter during the exposure process. |
| Databáze: | OpenAIRE |
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